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High Purity PTFE Wafer Cleaning Basket Acid Resistant Silicon Wafer Carrier Fluoropolymer Etching Rack

PTFE(Teflon) Labware

High Purity PTFE Wafer Cleaning Basket Acid Resistant Silicon Wafer Carrier Fluoropolymer Etching Rack

Item Number : PL-CP284

Price varies based on specs and customizations


Material
High-Purity Virgin PTFE
Chemical Resistance
Universal (Acid/Alkali/Solvent)
Customization
Fully Customizable Dimensions and Slot Profiles
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Product Overview

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This high-purity fluoropolymer carrier system is engineered specifically for the rigorous demands of the semiconductor and microelectronics industries. Designed to facilitate the safe and efficient handling of delicate silicon wafers during wet chemical processing, this unit serves as a critical interface between complex chemical baths and sensitive substrates. By utilizing premium-grade polytetrafluoroethylene (PTFE), the system provides an inert environment that prevents metallic contamination and ensures that the integrity of the wafers is maintained throughout etching, cleaning, and rinsing cycles.

The equipment is primarily utilized in cleanroom environments for high-stakes operations such as RCA cleaning, Piranha etching, and hydrofluoric acid (HF) dips. Beyond standard silicon processing, this unit is equally effective for compound semiconductors like Gallium Arsenide (GaAs) and solar cell production. Whether integrated into automated wet benches or used in manual immersion tanks, the system's robust construction and specialized geometry promote uniform chemical exposure and rapid drainage, making it an indispensable tool for achieving high yield and process consistency.

Built for long-term reliability in the harshest industrial environments, this equipment offers unparalleled resistance to strong acids, bases, and organic solvents. The inherent non-stick properties of the material minimize particle adhesion and facilitate easy decontamination between batches. Our commitment to precision engineering ensures that every carrier provides a secure fit for the wafers while allowing for maximum fluid dynamics, providing engineers and lab managers with the confidence that their most valuable substrates are protected under the most demanding thermal and chemical conditions.

Key Features

  • Superior Chemical Universal Resistance: Crafted from high-density PTFE, this unit is completely inert to virtually all aggressive chemicals, including concentrated sulfuric acid, hydrofluoric acid, and strong alkaline solutions, ensuring zero leaching and a long service life.
  • High-Temperature Thermal Stability: The system maintains its structural integrity and dimensional accuracy across a wide temperature range, allowing for consistent performance in boiling acid baths or high-temperature rinsing stages.
  • Precision-Machined Wafer Slots: Each slot is CNC-machined to exact tolerances to ensure minimal contact with the wafer surface while providing secure support, preventing mechanical stress and scratching during transport and immersion.
  • Optimized Fluid Dynamics: The "flower basket" geometry is engineered to facilitate laminar flow during chemical circulation and ensure rapid, streak-free drainage when the unit is lifted from the bath, reducing cross-contamination risks.
  • Integrated Ergonomic Handle Design: Featuring robust, customizable handles, the equipment allows for safe manual handling or seamless integration with robotic grippers, ensuring stability during high-speed transfers.
  • Ultra-Low Surface Energy: The naturally hydrophobic and non-stick surface of the material prevents the build-up of process residues and simplifies the cleaning protocol, maintaining the high purity standards required for trace analysis and sub-micron fabrication.
  • Customizable Configuration: We offer end-to-end customization for slot pitch, quantity, and overall dimensions, allowing the system to be tailored to specific wafer thicknesses and unique process vessel requirements.
  • Particle Contamination Control: The smooth, pore-free surface finish minimizes areas where particles can hide, ensuring that the equipment meets the strictest Class 10 and Class 100 cleanroom standards.
  • Structural Durability: Unlike molded alternatives, our machined fluoropolymer carriers offer superior mechanical strength and resistance to warping, even after repeated exposure to thermal cycling in corrosive environments.

Applications

Application Description Key Benefit
RCA Standard Clean Sequential SC-1 and SC-2 cleaning steps to remove organic residues and metallic contaminants from silicon wafers. Prevents metallic ion leaching, ensuring ultra-pure processing environments.
Piranha Etching Use of sulfuric acid and hydrogen peroxide mixtures to remove heavy organic materials and photoresist. Withstands extreme exothermic reactions and aggressive oxidation without degradation.
HF Dipping/Etching Removal of sacrificial oxide layers or native oxides using hydrofluoric acid solutions. Complete immunity to HF attack, which would destroy glass or quartz carriers.
Solar Cell Texturing Immersion of silicon wafers in alkaline or acid solutions to create light-trapping surface textures. High-volume throughput and resistance to concentrated KOH or NaOH solutions.
Post-CMP Cleaning Removal of slurry particles and chemical residues following Chemical Mechanical Polishing. Non-stick surface prevents slurry re-deposition on the carrier and wafers.
Photolithography Developing and stripping steps involving aggressive organic solvents and developers. Solvent-resistant construction ensures no swelling or softening of the carrier material.
Ultrasonic Cleaning High-frequency acoustic cleaning of delicate electronic components in aqueous solutions. Transmits ultrasonic energy effectively while protecting components from mechanical impact.
GaAs Processing Wet chemical etching and cleaning of compound semiconductor substrates for optoelectronics. Gentle, secure support for brittle substrates during critical manufacturing steps.

Technical Specifications

Parameter Description / Specification (PL-CP284 Series)
Product Item Number PL-CP284
Primary Material High-Purity Virgin PTFE (Polytetrafluoroethylene)
Chemical Compatibility Universal (Strong Acids, Bases, Solvents, Oxidizers)
Standard Wafer Sizes Compatible with 4-inch, 6-inch, and 8-inch wafers
Customization Options Fully customizable dimensions, slot counts, and slot widths
Handle Configurations Fixed, removable, or robotic-compatible styles (Customizable)
Operating Temperature -200°C to +260°C (Continuous)
Surface Finish High-precision CNC machined, low-porosity surface
Slot Design V-shape or custom profiles for minimal contact area
Manufacturing Process 100% CNC Machined for precision and structural integrity
Purity Level Trace analysis grade, metal-free manufacturing

Why Choose This Product

Choosing this PTFE carrier system represents a commitment to process purity and long-term operational efficiency. In the high-precision world of semiconductor fabrication, the carrier is more than just a holder; it is a critical component that must perform flawlessly to prevent costly batch failures. Our units are manufactured using premium virgin fluoropolymers, ensuring that no impurities are introduced into your sensitive chemical baths. The precision of our CNC machining process allows for tighter tolerances than injection molding, providing a level of reliability and repeatability that is essential for modern microelectronics manufacturing.

Furthermore, our specialization in fluoropolymer fabrication allows us to offer unmatched customization. We understand that every wet bench and every process line has unique requirements, which is why we do not limit our customers to off-the-shelf sizes. From specialized slot spacings to unique handle geometries for automated systems, we provide bespoke solutions that integrate perfectly with your existing infrastructure. This focus on engineering excellence, combined with the inherent durability of PTFE, ensures that our products provide a lower total cost of ownership through extended service life and improved process yields. For a customized solution tailored to your specific wafer handling needs, please contact our technical team for a detailed consultation and quote.

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Product Datasheet

High Purity PTFE Wafer Cleaning Basket Acid Resistant Silicon Wafer Carrier Fluoropolymer Etching Rack

Category Catalog

Ptfe(Teflon) Labware


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